Stereoscopic Fracture Surface Analysis by SEM Using Advanced Stereo Matching
Jiang JUN and Shinsuke SAKAI
Abstract:Three-dimensional analysis of fracture surface by SEM (Scanning Electron Microscope) is inevitable to clarify the cause of fracture. It is effective to analyze with stereo matching. However, conventional template matching method to measure 3-dimensional profile of fracture surface usually employs fixed template size and has deficiencies such as mismatching and much processing time. In this paper, we develop a new stereo matching algorithm, which can save processing time and assure accuracy. In this new template matching method, template size is varied to assure accuracy and lessen mismatching points. When searching the matching templates, we calculate correlation coefficient of image template pixels in every 2 or 3 pixels to save processing time. In order to investigate the precision and the usefulness of the proposed method, two examples of reconstructing fracture surfaces are successfully shown. It is practically realized to measure three-dimensional profile of fracture surface in personal computer. Key Words:3-dimensional measurement, SEM, stereo matching, algorithm, fracture surface, fracture